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Quartz Antenna for RF Ion Sources

E.O. Lawrence Berkeley National Laboratory

APPLICATION OF TECHNOLOGY:

ADVANTAGES:

ABSTRACT:

Ka-Ngo Leung and colleagues at Berkeley Lab have devised a quartz antenna for use in multicusp ion sources as an internal induction coil. The performance of this new quartz antenna exceeds that of older porcelain-coated antennas. The new antenna operates cleaner and longer in high power cw or pulsed operation applications where water cooling is not possible. Results show that it is capable of withstanding dense plasma environments at rf power higher than 5 kW.

STATUS: Patent Pending. Available for licensing

REFERENCE NUMBER: IB-1239

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Last updated: 09/17/2009