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Superconducting Multilayer Interconnect

IB-797

E.O. Lawrence Berkeley National Laboratory

APPLICATION OF TECHNOLOGY:

ADVANTAGES:

ABSTRACT: Technique to fabricate multilayer interconnects and multiturn flux transformers for use with direct current superconducting quantum interference devices (SQUIDs). Berkeley National Laboratory's multilayer structures use the high transition temperature (high Tc) superconductor YBa2Cu3O7-x -- yttrium-barium-copper-oxide (YBCO). In these trilayer thin-film structures, YBCO - insulator - YBCO, each film is deposited and patterned independently using conventional photolithographic techniques.

Using photolithographic techniques, John Clarke at Berkeley Lab was able to pattern the two YBCO films into strips (wires) with features as small as a few microns. Circuit elements such as crossovers, places where crossing strips of YBCO are electrically isolated by the intervening insulating film, and window contacts, places where the two YBCO films make superconducting electrical contact through a hole patterned into the insulating layer, can be formed using the Berkeley National Laboratory processes. Photolithographic techniques are considered important both for miniaturization and also for permitting large-scale, economical production of devices.

The high Tc crossover and via (connections through windows) technology has enabled Berkeley National Laboratory to build the first high Tc flux transformer with 10-turn multilayer input coils. The flux transformer increases the sensitivity of magnetometers based on dc Superconducting QUantum Interference Devices (SQUIDs). During tests, the devices performed well at temperatures as high as 86 Kelvin (minus 187 centigrade).

High Tc SQUIDs, combined with the new Berkeley National Laboratory materials technology, can measure magnetic signals emitted by the heart with greater sensitivity than ever before.

STATUS: U.S. Patent #5,256,636. Available for licensing

REFERENCE NUMBER: IB-797

FOR MORE INFORMATION, SEE:

F. Ludwig, E. Dantsker, D. Koelles, R. Kleiner, A. H. Miklich, and J. Clarke, "Multilayer Magnetometers Based on High-Tc SQUIDs," Applied Superconductivity Vol. 3, No. 7-10, pp. 383-398, 1995

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Last updated: 09/17/2009