LBNL Staff Physicist

KAGoldberg@lbl.gov
phone: 510-495-2261

Education
A.B. Physics and Applied Mathematics, University of California, Berkeley
Ph.D Physics, University of California, Berkeley

Major Awards
2003 R&D 100 Award
1998 Advanced Light Source Halbach Prize for Instrumentation

General Research Interests
Extreme Ultraviolet Optics, Interferometry and Optical Testing, EUV Lithography, EUV Mask Inspection, Optical System Modeling, Synchrotron Light, Coherence

MSD Research Projects:
Center for X-Ray Optics
Sematech Berkeley Actinic Inspection Tool


Personal ebsite: http://goldberg.lbl.gov/

Figures: (top) Two EUV interferometer designs. The interference of two coherent waves.