E.O. Lawrence Berkeley National Laboratory
APPLICATION OF TECHNOLOGY:
- High current ion sources
- Ion implanters
- Lithography
ADVANTAGES:
- Coated antennas eliminate short-circuit between plasma and bare sources
- Longer lifetime than porcelain-coated antennas
- Cleaner operating conditions since quartz resists breakdown at high power levels
- Prevents coolant loss should quartz tubing break
ABSTRACT:
Ka-Ngo Leung of Berkeley Lab and a colleague have designed an improved quartz antenna containing a conductor in a glass tube that prevents coolant loss if the glass tubing breaks. Berkeley Lab's new antenna will find application in high current ion sources for accelerators, ion implanters, lithography, etc.
STATUS: U.S. Patent #6,376,978. Available for licensing in specific fields of use
REFERENCE NUMBER: IB-1538
