APPLICATIONS:
- Imaging electrical properties of dielectric and electrically conducting materials with high resolution
- Quality monitoring and control for some fabrication applications
ABSTRACT:
Scientists at Berkeley Lab have developed a scanning microscope that uses near-field evanescent electromagnetic waves to probe sample properties, making it capable of high-resolution imaging and quantitative measurements of electrical properties, such as dielectric constant, tangent loss, conductivity, complex electrical impedance and other electrical parameters, of both dielectric and electrically conducting materials. The quantitative map corresponds to the imaged detail.
Key features of the invention include the probe, which emits an evanescent wave and minimizes interfering propagating wave emissions; a computing element; and a means to maintain a constant separation distance between the tip and the sample while measurement scans are performed.
For more information, see Issued US Patent 6,173,604.
STATUS: Issued US Patent 6,173,604. Available for licensing or collaborative research.
REFERENCE NUMBER: IB-1432
SEE THESE OTHER BERKELEY LAB TECHNOLOGIES IN THIS FIELD:
Analytical Scanning Evanescent Microwave Microscope and Control Stage, IB-1506
Scanning Tip Microwave Near Field Microscope, IB-1183
