Plasma Processing
all the interesting plasma chemistry is electron initiated
quantitative understanding for most of the interesting process gases and relevant fragments is sparse -- specific examples
branching ratios for electron-impact dissociation are prominently absent: identifying the species
abatement of PFCs in burn boxes is a plasma dependent process, as is chamber cleaning
ionized metal plasma vapor deposition is key for new interconnect in microprocessors (e-M* ionization)
theory and advanced computational modeling can have a definitive economic impact (LSI example)